JPH0113405Y2 - - Google Patents
Info
- Publication number
- JPH0113405Y2 JPH0113405Y2 JP16680883U JP16680883U JPH0113405Y2 JP H0113405 Y2 JPH0113405 Y2 JP H0113405Y2 JP 16680883 U JP16680883 U JP 16680883U JP 16680883 U JP16680883 U JP 16680883U JP H0113405 Y2 JPH0113405 Y2 JP H0113405Y2
- Authority
- JP
- Japan
- Prior art keywords
- metal film
- insulating film
- capacitor
- layer metal
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 37
- 239000003990 capacitor Substances 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 20
- 239000004065 semiconductor Substances 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 239000004020 conductor Substances 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 5
- 230000015556 catabolic process Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16680883U JPS6076027U (ja) | 1983-10-27 | 1983-10-27 | マイクロ波集積回路用キヤパシタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16680883U JPS6076027U (ja) | 1983-10-27 | 1983-10-27 | マイクロ波集積回路用キヤパシタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6076027U JPS6076027U (ja) | 1985-05-28 |
| JPH0113405Y2 true JPH0113405Y2 (en]) | 1989-04-19 |
Family
ID=30365105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16680883U Granted JPS6076027U (ja) | 1983-10-27 | 1983-10-27 | マイクロ波集積回路用キヤパシタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6076027U (en]) |
-
1983
- 1983-10-27 JP JP16680883U patent/JPS6076027U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6076027U (ja) | 1985-05-28 |
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